Optical Analysis Equipment Development Research Group
Develops a thermal analysis system capable of high-resolution, quantitative, and non-contact measurement and visualization of fine heat distributions occurring inside micro-electronic devices, and promotes the commercialization of optical analysis equipment by verifying the system through demonstration studies.
Research Infrastructure
Develops systems integrating imaging/measurement optical hardware optimized for application fields with control/analysis software, and conducts demonstration research for quantitative performance analysis and verification for application use.
Development and demonstration research of optical microscope-based thermal analysis systems