Optical Analysis Equipment Development Research Unit
Development of analysis equipment and analytical technologies for thermal characteristics of semiconductor/display devices based on optical microscopy
- Development of a thermal analysis system capable of measuring and imaging the distribution of minute heat generation occurring in micro-electronic devices with high resolution, quantitative, and non-contact methods, and promotion of commercialization of optical analysis equipment by verifying it through demonstration research
Research Infrastructure
Development of systems integrating imaging/measurement optical hardware optimized for application fields with control/analysis software, and conduct of demonstration research for quantitative performance analysis and verification so that they can be applied to application fields
Development and demonstration research of an optical microscopy-based thermal analysis system
