Light–Ion Integrated Chemical Imaging Analytical Instrumentation Research Unit
Conduct of research to identify causes of micro defects and degradation occurring in semiconductors/displays through the development of a light–ion beam-based imaging mass spectrometry system
Research Content
- Development and demonstration research of a high-resolution two-dimensional imaging analysis system for analyzing the chemical characteristics of devices
- Development of device analysis systems and technologies based on light imaging with advanced light source control for micro defect detection and complex analysis
- Development of high-resolution depth-direction compound analysis technologies based on soft etching to identify causes of degradation
Conceptual diagram for the development of a light–ion integrated compound imaging analysis system
Research Infrastructure
Possession of research equipment development infrastructure based on optical/mass imaging analysis
- Based on cluster ion beam analytical technologies, development of an imaging mass spectrometry system capable of high-precision analysis of organic molecular biological samples and display-related materials/devices, while simultaneously focusing on the localization of surface processing and pretreatment technologies using gas cluster ion beams (GCIB)
- Development and application research of multimodal optical microscopy systems capable of structural and molecular imaging by combining optical interference, confocal, and nonlinear imaging technologies for three-dimensional samples, along with AI-based analytical technologies
Three-dimensional molecular imaging mass spectrometer
Multimodal nano-bio optical microscope
Recent research achievement in analytical chemistry (2025): Development of a next-generation surface mass spectrometry instrument (QIT-ToF-SIMS) integrating tandem mass spectrometry and laser spectroscopy.
Journal of Physical Chemistry Letters 誌, IF=6.7, JCR 상위 8.18%, ’25.11. 표지 논문
Published in Journal of Physical Chemistry Letters, IF=6.7, top 8.18% in JCR, November 2025. Cover article.
Recent research achievement in optical microscopy (2024): Development of a multimodal optical imaging instrument integrating confocal fluorescence microscopy and optical interference microscopy.
Published in Optics and Laser Technology, IF=4.6, top 17.2% in JCR, December 2024.
