The electron microscopy field uses advanced research instruments such as TEM (Transmission Electron Microscopy), SEM (Scanning Electron Microscopy), and FIB (Focused Ion Beam) to observe and analyze the microstructure and compositional information of materials at the atomic level. TEM can perform imaging, diffraction, qualitative, and quantitative analysis all in one instrument. With an outstanding resolution of <0.10 nm, it enables not only atomic arrangement imaging of micro-regions but also precise qualitative and quantitative analysis of elements and chemical bonding states.
FIB uses fine ion sources to prepare thin, uniform, high-quality specimens essential for TEM analysis, and it is also applied to microcircuit modifications and processing of specific regions at tens-of-nanometer scales.
Representative Equipment
- Bio-HVEM, Mono Cs STEM, Cryo-FIB
- Thin film, interface, and surface microstructural property analysis across materials, bio, and environmental fields

Mono Cs STEM
Application Fields
- Atomic-level structural analysis of nanostructured materials, 3D electron tomography, electronic structure and chemical analysis (HV-EELS), and real-time evaluation of structural changes in materials
- Mechanism of action analysis of target substances for intractable diseases
- 3D structural analysis of neurons and intracellular proteins related to neurodegenerative diseases
- Basic research for discovering new drug candidates