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한국기초과학지원연구원

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AI enhanced Electron Microscopy Research Unit

AI enhanced Electron Microscopy Research Unit

The AI-enhanced EM Research Unit integrates artificial intelligence (AI)-based analytical technologies with electron microscopy systems to develop and advance high-resolution structural and electronic structure analysis and quantitative data interpretation technologies at atomic and nanoscale levels.

By integrating AI analysis, 4D-STEM, in-situ/operando TEM, and 3D reconstruction technologies, the unit elucidates structure–performance–degradation mechanisms of national strategic materials such as secondary batteries, semiconductors, and energy materials at the atomic level.

Through these efforts, the unit leads problem-solving research based on analytical science and promotes the establishment of next-generation intelligent electron microscopy analysis platforms.

Research Content

Research on AI-based electron microscopy analytical technologies
인공지능(AI) 기반 전자현미경 분석기술 연구
Research on fuel cell degradation using machine learning-based scanning transmission electron microscopy
머신러닝 기반 주사투과전자현미경 연료전지 열화 연구

Research Infrastructure

The AI-enhanced EM Research Unit possesses one of the nation’s most advanced EM analysis infrastructures integrating ultra-high-performance electron microscopes, sample preparation equipment, environmental control systems, and AI analysis technologies, along with specialized research personnel capable of simultaneously advancing analytical technologies and conducting collaborative research.

  • Equipment holdings: High-voltage transmission electron microscope (HVEM), Mono Cs TEM/STEM, Cs TEM, Double Cs TEM, FIB and Cryo-FIB, in-situ TEM/SEM systems, air-isolated transfer/analysis chambers, high-resolution EELS/EDS systems, etc.
  • Based on unique analytical capabilities linking atomic structure, electronic structure, and dynamic behavior in semiconductors, secondary batteries, catalysts, and energy materials, the unit stably conducts domestic and international collaborative research and commissioned projects with academia, industry, and research institutes.
금속-반도체-금속 구조의 2차원 반도체 소자 제작 & EM 분석 (atomic STEM, EDX)
LaCoO₃ 산화물 내 산소공공 거동(Local strain analysis & atomic resolution STEM 분석)

Research on fabrication of metal–semiconductor–metal structured 2D semiconductor devices and EM analysis

Elucidation of vacancy behavior and deformation behavior in oxides

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