High Resolution 2-Dimensional X-ray Diffractometer

• High Resolution
• Thin Film Analysis
• Micro-Diffraction
• 2D-Application

High-Resolution & Thin Film Analysis

• 고분해능 분석 : Rocking curves, RSM, Wafer Map
• GI-XRD 분석, In-plane 측정
• X-ray Reflectivity 측정 : Thin File의 Density, Roughness, Thickness분석
• Thin Film Stress 분석
• Thin File Texture 분석

Micro-Diffraction

• 미소영역 분석 : MONTEL Mirror, UBC Collimator
• GID(In-plane) 측정
• 미소영역 Stress 분석
• 미소영역 Texture 분석
• Rocking curves, RSM

2D-Application

• 시료형태에 따른 반사 및 투과 측정 : SAXS, GI-SAXS, WAXS
• 미소영역 분석(MONTEL Mirror+UBC Collimator)
• 집합조직 분석 : Preferred Orientation, Polefigure(2D)
• 잔류옹력 분석(2D)

2D Detector_VANTEC500

• 2,048 x 2,048 pixels
• Pixel size : 68㎛ x 68㎛
• Axtive Diameter : 14cm
• Min. distance : <6cm
• Max. distance : >35cm

Hardware

• Primary : Goabel Mirror(parallel), MONTEL Mirror(Focusling), Ge(022) 2x Asymmetric, Ge(022) 4x Symmetric, UBC(Micro-collmator) : 0.1, 0.3, 0.5, 1.0, 2.0mm
• Secondary : Triple bounce Analyzer : Ge(022) 3X, Parallel Plate Collimator, Receiving Sllit, Detector Sllit, Anti scatter sllit
• Detector : Scintlliator(0D), Lynxxeye(0D/1D) : 192 strip, 75㎛, VANTEC500(2D) : 2,048 x 2,048 pixels : pixel size 68㎛ x 68㎛

Software

• EVA
• TOPAS
• LEPTOS
• TEXTURE
• SAXS
• PDF2