장비성능

• Magnification: x20 ~x100,000 (Effective :~ x50,000)
• Accelerating Voltage: 1kV to 30kV
• Electron Gun: Tungsten Filament(w)
• Detector: SE Detector (Optional : BSE, EDS)
• EM-30 Stage: x: 35mm (Motorized)，Y: 35mm (Motorized) T: O t0 450 (Motorized)，R: 360 ，Z:5 to 50mm
• Maximum Sample Size: 45mm (H)，60mm (Diameter)
• Image Mode(pixel)
  • RDE (320x240), TV (640x480), Slow (800x600)
  • Photo (1280x960, 2560x1920, 5120x3840)
• Frame Rate
  • RDE (MAX. 30 frames/sec)
  • TV (MAX. 10 frames/sec)
  • Slow (MAX. 2 frames/sec)
• Vacuum System: Turbo Molecular Pump (Less than 3min)