국산장비활용랩 visual_03

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HOME 국산장비활용랩 장비소개

SEM
테이블주사현미경

EM-30
(주)코셈
SEM
Semiconductor, Chemical, Construction, Energy,
Metal Material, Bioengineering

장비성능

  • Magnification: x20 ~x100,000 (Effective :~ x50,000)
  • Accelerating Voltage: 1kV to 30kV
  • Electron Gun: Tungsten Filament(w)
  • Detector: SE Detector (Optional : BSE, EDS)
  • EM-30 Stage: x: 35mm (Motorized),Y: 35mm (Motorized) T: O t0 450 (Motorized),R: 360 ,Z:5 to 50mm
  • Maximum Sample Size: 45mm (H),60mm (Diameter)
  • Image Mode(pixel)
    • RDE (320x240), TV (640x480), Slow (800x600)
    • Photo (1280x960, 2560x1920, 5120x3840)
  • Frame Rate
    • RDE (MAX. 30 frames/sec)
    • TV (MAX. 10 frames/sec)
    • Slow (MAX. 2 frames/sec)
  • Vacuum System: Turbo Molecular Pump (Less than 3min)