ㅇ Electron Optics |
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High-resolution field emission -SEM column optimized for high-brightness/high-current |
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Accelerating voltage : 200V - 30kV |
ㅇ Electron beam resolution |
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High-vacuum |
Low-vacuum |
Extended low-vacuum mode(ESEM) |
0.8nm at 30kV (STEM) 1.2nm at 30kV (SE) 2.5nm at 30kV (BSE) 2.9nm at 1kV (SE) |
1.5nm at 30kV (SE) 2.5nm at 30kV (BSE) 2.9nm at 3kV (SE) |
1.5 nm at 30kV (SE) | |
ㅇ Ion optic |
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High-current ion column with Ga liquid- |
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Accelerating voltage : 2kV - 30kV |
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Probe current : 1pA - 65nA in 15steps |
ㅇ Ion beam resolution |
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7 nm at 30kV |
ㅇ Stage |
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X = 50 mm * Y = 50mm * Z = 25mm |
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Maximum sample height = 50mm |
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T = -15° to 75° |
ㅇ Accessories |
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EDS |
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GIS : Pt |
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Auto-FIB functionality for multi-site sample preparation |
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Auto-Slice and View automation software |
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cooling stage |