High Resolution 2-Dimensional X-ray Diffractometer
- High Resolution
- Thin Film Analysis
- Micro-Diffraction
- 2D-Application
High-Resolution & Thin Film Analysis
- 고분해능 분석 : Rocking curves, RSM, Wafer Map
- GI-XRD 분석, In-plane 측정
- X-ray Reflectivity 측정 : Thin File의 Density, Roughness, Thickness분석
- Thin Film Stress 분석
- Thin File Texture 분석
Micro-Diffraction
- 미소영역 분석 : MONTEL Mirror, UBC Collimator
- GID(In-plane) 측정
- 미소영역 Stress 분석
- 미소영역 Texture 분석
- Rocking curves, RSM
2D-Application
- 시료형태에 따른 반사 및 투과 측정 : SAXS, GI-SAXS, WAXS
- 미소영역 분석(MONTEL Mirror+UBC Collimator)
- 집합조직 분석 : Preferred Orientation, Polefigure(2D)
- 잔류옹력 분석(2D)
2D Detector_VANTEC500
- 2,048 x 2,048 pixels
- Pixel size : 68㎛ x 68㎛
- Axtive Diameter : 14cm
- Min. distance : <6cm
- Max. distance : >35cm
Hardware
- Primary : Goabel Mirror(parallel), MONTEL Mirror(Focusling), Ge(022) 2x Asymmetric, Ge(022) 4x Symmetric, UBC(Micro-collmator) : 0.1, 0.3, 0.5, 1.0, 2.0mm
- Secondary : Triple bounce Analyzer : Ge(022) 3X, Parallel Plate Collimator, Receiving Sllit, Detector Sllit, Anti scatter sllit
- Detector : Scintlliator(0D), Lynxxeye(0D/1D) : 192 strip, 75㎛, VANTEC500(2D) : 2,048 x 2,048 pixels : pixel size 68㎛ x 68㎛
Software
- EVA
- TOPAS
- LEPTOS
- TEXTURE
- SAXS
- PDF2
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