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원자분해능 전자구조 주사투과전자현미경

Home 연구활동선도연구장비원자분해능 전자구조 주사투과전자현미경 인포그래픽

인포그래픽 < 원자분해능 전자구조 주사투과전자현미경 < 선도연구장비

세계 일류의 첨단과학을 이끄는 KBSI 선도연구장비를 소개합니다 나노물질의 화학구조를 원자단위로 보는 Mono Cs STEM (Monochromated Cs-Corrected Scanning Transmission Electron Microscope) 01 제원 및 성능/특징 00 형태 EDX system Double SDD system 1432 Monochromator system Double Wien-filter (30-200kV) 1st Commercial Monochromated Ke NEO ARM STEM detector Hybrid ABF detector (HAADE, BF, ABF, e-ABF) 00 Probe Corrector ASCOR-5 order corrector ASCOR 40 CESCO 34 Enhanced ABF mode Probe Corrector Continuum GIF (CMOS) Image processing -ABE High speed (30), high quality m Resolution (in STEM) : 0.136 nm (30kV) 0.08 nm (200kV) • Energy resolution: <25 meV (@60kV) <36 meV (@200kV) Atomic scale images 02 활용분야 반도체구조분석 나노구조 신소재 개발 03 대표연구성과 Atomic Structure • Atomic scale analysis 1st Commercial Monochromated NEO ARM 에너지소재연구 Bio-material Interface analysis 00 05 10 15 20 25 30 35 Distance (nm) :Direct observation of atomic scale a BizTe, nanoplatelet. Electronic Structure :Sharp interface without defects Nat. Commun. 11 1285 (2020) Advan. Elect. Mater. 1800504 (2018) • Atomic EELS map .interface ALO TIO La Co Ti SO, 10nm :Atomic column resolved chemical EELS/EDS mapping 470 530 545 560 Energy loss (eV) : Oxygen vacancies at the interface for studying 2 DEG mechanism Atomic Dynamics LaCoo, LaCoO20 LaCoO275 LaCoO27 LaCoO2s n=5 (A,B,O) (A,B,0..) n=3 (A,B,O,) n=2 (A,B,0,) ACS Nano 12 10403 (2018) • Chemical analysis : Observation of fine changes in the spectral structure of oxygen vacancies. J. Mater. Chem. A. 825345 (2020) ACS ANO Wwwwww LSAT COURARAR LSAT POLSAT 34A 45A :Direct observation of oxygen vacancies unit-cell by unit-cell ACS Nano 11 6942 (2017)