Research Focus

• Operation of ultraprecision machining tech-shop
• Development of ultraprecision machining and metrology technique on freeform optics
• Development of multimodal optical microscope for nanobio applications

Representative Research Cases

Development and commercialization of freeform optics surface measuring instrument

• High speed surface measuring instrument for large area freeform optics was successfully developed, and commercialized through technology transfer to company. This measure can measures the surface of 300 mm diameter freeform optics within 1 minutes with 2 μm (PV) precision.

Prototype system of high speed shape measuring instrument for large area freeform optics