skip navigation bar
go content
go menu


Representative Research Publications

Development of a new concept mixed-gas cluster ion beam for time-of-flight secondary ion mass spectr 2022 > Representative Research Publications > Research Results Home

Development of a new concept mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry

  • Applied Surface Science / January 2022
  • Sang Ju Lee(First author), Myoung Choul Choi(Corresponding author)

Research Summary

The mixed gas cluster ion beam enables mass imaging analysis that is optimized with the desired characteristics according to the samples to be analyzed according to the mixing ratio of the mixed gas and is evaluated as a core technology with new competitiveness in the research equipment market. The analysis characteristics that vary depending on the various mixing ratios of argon and carbon dioxide were confirmed. When the pertinent ratio of carbon dioxide is mixed compared to argon, the performance of the ion beam is dramatically improved throughout the analysis characteristics such as spatial resolution, sensitivity, and surface processing precision. As the ratio of carbon dioxide to argon is higher, the spatial resolution of the ion beam is improved by more than 30% compared to the existing single gas ion beam, and the surface processing precision can be secured by more than 5 times. In particular, mass spectrometry sensitivity, which is the most important performance indicator of mass spectrometry equipment, was found to increase by more than 250% at a mixing ratio of 15% carbon dioxide to argon.

Expected Outcomes

The mixed gas cluster ion beam mass spectrometer enables high-resolution mass analysis of organic materials, OLED displays, and biological tissue samples, which could not be analyzed due to technical limitations and can be used in various industrial fields, such as chemical modification of OLED materials, analysis, and diagnosis of biological tissues including cancer, and new drug development.

Related Figures

Fig. 1 KBSI ToF-SIMS Mass Spectrometer System with Mixed Gas Cluster Ion BeamFig. 1 KBSI ToF-SIMS Mass Spectrometer System with Mixed Gas Cluster Ion Beam

Fig. 2 Secondary ion efficiency for the CO2/Ar mole fraction and Change in the sputtering yield of Si wafer for the mixed-gas ratio.Fig. 2 Secondary ion efficiency for the CO2/Ar mole fraction and Change in the sputtering yield of Si wafer for the mixed-gas ratio.

Back  to List